Product Description

The fruit of nearly ten years of active work and collaboration in both the academic and industrial settings, this book offers in-depth analyses of run-to-run (R2R) control. The authors develop methods with a totally new, commercially proven approach that provides a path to the robust, effective R2R control destined to replace the ad hoc, piecemeal, error-prone, or, in most cases, nonexistent sequential control methods of the past. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.

Product Details

• Amazon Sales Rank: #1964619 in Books
• Published on: 2000-11-30
• Original language: English
• Number of items: 1
• Binding: Hardcover
• 368 pages

From the Back Cover
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.